SKX Series Semi-Automatic Probe Station

SKX series is an integrated and highly efficient semi-automatic wafer probe platform that is specialized in testing the performance of various advanced chips. It integrates various functions such as electric light wave and microwave, etc. It has the highest temperature width and test accuracy in the industry at present, and can match various test application environments, providing reliability wafer testing within -60 ~300 wide temperature range.

Application direction:

Equipment professional deal with 12 “8” 6 “wafer Si/GaN/SiC and other kinds of devices of advanced chip performance test, can be equipped with corresponding instruments and meters, for the I – V C – V light RF signal character such as 1 / f noise analysis, feature-rich devices, scalable high-power wafer test RF test automatic test, and can load temperature control system, satisfy the customer in the high and low temperature environment of all kinds of wafer device performance test requirements.

***Custom design solutions for special dimension or performance are possibile on request***

Key Features

The industry's most efficient CHUCK system, test efficiency increased by more than 40%

Industry leading 3 times imaging technology

Auxiliary CHUCK module silicon wafer safe upper and lower

Design of O-type needle seat platform

Air film shock absorption system

Anti-interference shielding system

Independent research and development of software integration system, more compatibility

Flexible optional configuration and extension

Model

SKX6

SKX8

SKX12

Electricity Demand

220V,50~60Hz

Product Size

1060mm*1610mm*1500mm

Weight

About 1500kg

1. Chuck
XY Travel range

350mm” 365mm

XY Resolution

0.1μm

XY Repeatability

≤±1μm

XY Move speed

≥70mm/s

Z Travel range

20mm

Z Resolution

0.1μm

Z Repeatability

≤±1μm

Z Move speed

≤20mm/s

2. Temperature specification
Range

– 60°C-300°C

Stability

±0.1°C

Resolution

0.01°C

3. Micropositioner specification
Current leakage

1pAN@25°C, 100fAN@25°C (with shielding box)

Connector type

Banana plug adapter/Coaxial /Three-axis/ SMA /SHV etc.

4. Multi-magnification optical system

15:1 three-speed zoom microscope, can display low, medium and high magnification images at the same time, easy to point needle

5. Wide application

Support SiC/GaN wafer test, high power wafer test

Replaceable Chuck design for different wafer testing

Main Machine

Module No. Item Description
SKX6 Semi-Automatic Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 1500 kg; Dimension: 1060mm*1610mm*1500mm (L*W*H).
SKX8 Semi-Automatic Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 1500 kg; Dimension: 1060mm*1610mm*1500mm (L*W*H).
SKX12 Semi-Automatic Probe Station Electricity Demand: 220VC, 50~60Hz; Weight (about): 1500 kg; Dimension: 1060mm*1610mm*1500mm (L*W*H).

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