SKC series prober has excellent mechanical system, stable structure and performance, ergonomic design, easy operation, support multi-function upgrade, rich and comprehensive functions. This product is mainly used in the manufacturing and research fields of integrated circuit, LED, LCD, solar cell and semiconductor industry.
LD/LED/PD test, PCB/ package device test, MATERIAL/device IV/CV characteristic test, internal circuit/electrode /PAD test, hf RF test, etc.
Low temperature test in non-vacuum environment
Compatible with high magnification metallographic microscope
Suitable in University and Research laboratory
Up to 12-inch wafer testing
High precision lead screw drive structure, linear movement
Comfortable large handle, Driver Screws: Zero back lash
0.2 um or above internal circuit / electrode / PAD probe
LD/LED/PD Light intensity / wavelength testing
IV/CV Characteristic testing of materials / devices
High frequency characteristic test of devices (up to 300GHz)
| Model | SKC6 SKC8 SKC12 |
| Electricity Demand | 220VC, 50~60Hz |
| Weight (about) | SKC6: 150kg SKC8: 170kg SKC12: 250kg |
| 1. Chuck | |
| Size & Rotation Angle | SKC6: 6″, 360° Rotation SKC8: 8″, 360° Rotation SKC12: 12″, 360° Rotation |
| X-Y Moving Range | SKC6: 6″ * 6″ SKC8: 8″ * 8″ SKC12: 12″ * 12″ |
| Moving Resolution | 1μm |
| Sample Fixed Mode | Vacuum adsorption |
| Electrical Design | Chuck Surface is Electrical Floating with Banana plug adapter, can be used as a backside electrode |
| 2. Platen | |
| O shape platen | SKC6: 8 micropositioners available SKC8: 10 micropositioners available SKC12: 12 micropositioners available |
| Move range & adjustment | Platen can be quickly lifted up and down 6mm with automatic locking function. Platen can be fine tuned up and down 25mm precisely with 1μm resolution.
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| 3. Microscope | |
| Moving Range | X-Y axis : 2″ * 2″, Z axis : 50.8mm |
| Magnification | 16~100X / 20~4000X |
| CCD Pixel | 50W (Analog) / 200W (Digital) / 500W (Digital) |
| 4. Micropositioner | |
| X-Y-Z Moving Range | 12mm-12mm-12mm / 8mm-8mm-8mm |
| Mechanical resolution | 10μm / 2μm / 0.7μm / 0.1μm |
| Current Leakage Accuracy | Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C, |
| Cable Connectors | Banana head / Crocodile clip / Coaxial / Triaxial / SMA / K |
| Dimension | SKH6: 860mm*850mm*700mm (L*W*H) SKH8: 880mm*860mm*750mm (L*W*H) SKH12: 1400mm*920mm*920mm (L*W*H) |
| Module No. | Item | Description |
| SKC6 | High And Low Temperature Analysis Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 150kg; Dimension: 860mm*850mm*700mm (L*W*H). |
| SKC8 | High And Low Temperature Analysis Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 170kg; Dimension: 880mm*860mm*750mm (L*W*H). |
| SKC12 | High And Low Temperature Analysis Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 250kg; Dimension: 1400mm*920mm*920mm (L*W*H). |
| Module No. | Item | |
| SKC01 | Probe clamp | |
| SKC02 | Dark field of microscope / DIC / Normarski Testing light intensity / wavelength testing | |
| SKC03 | RF Testing | |
| SKC04 | High voltage and high current test | |
| SKC05 | Shielding box | |
| SKC06 | Special adapter | |
| SKC07 | Vibration free table | |
| SKC08 | Gold-plated chuck | |
| SKC09 | Coaxial / Triaxial chuck | |
| SKC10 | Light intensity / Spectrum / Wavelength test | |
| SKC11 | Active probe | |
| SKC12 | Low current / Capacitance test | |
| SKC13 | Intergartion of intergral sphere | |
| SKC14 | Fixture of Packaged IC test | |
| SKC15 | Fixture of PCB test |
