SKE series prober has excellent mechanical system, stable structure and performance, ergonomic design, more convenient operation, support multi-function upgrade, more abundant product functions. The product is mainly used in the manufacturing and research fields of integrated circuit, LED, LCD, solar cell and other industries.
Application: IC/LD/LED/PD test, PCB / Packaged device test, RF test etc.
Compact design, affordable price
Compatible with high magnification metallographic microscope, and can fine tune the movement
University / Institute / Company laboratory use
Up to 12 inch wafer testing
Precision lead screw drive structure, linear movement
Driver Screws: Zero back lash
Available for 1um electrode / PAD probe
LD/LED/PD Light intensity / wavelength testing
IV/CV Characteristic testing of materials / devices
High frequency characteristic test of devices (up to 300GHz)
| Model | SKE4 SKE6 SKE8 SKE12 |
| Electricity Demand | 220VC, 50~60Hz |
| Weight (about) | SKE4: 70kg SKE6: 80kg SKE8: 85kg SKE12: 180kg |
| 1. Chuck | |
| Size & Rotation angle | SKE4: 4″, 360° Rotation SKE6: 6″, 360° Rotation SKE8: 8″, 360° Rotation SKE12: 12″, 360° Rotation |
| X-Y Travel Range | SKE4: 4″ * 4″ SKE6: 6″ * 6″ SKE8: 8″ * 8″ SKE12: 12″ * 12″ |
| Z Travel Range | 6mm (Fast switching) / 6mm (Fine-tune) |
| Moving Resolution | 10μm |
| Sample fixed mode | Vacuum adsorption |
| Electrical design | Electrical Floating with Banana plug adapter, can be used as a backside electrode |
| 2. Platen (U Shape) | SKE4: 6 micropositioners available SKE6: 8 micropositioners available SKE8: 10 micropositioners available SKE12: 12 micropositioners available |
| 3. Microscope | |
| Moving range | X-Y : 2″ * 2″, Z : 50.8mm |
| Moving Resolution | 1μm |
| Switching lens mode | Microscope Manually Tilting 30°by Lever |
| Magnification | 16~100X/20~4000X |
| Lens specification | Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 、100X（Option） |
| CCD Pixel | 50W (Analog) / 200W (Digital) / 500W (Digital) |
| 4. Micropositioner | |
| X-Y-Z Moving range | 12mm-12mm-12mm / 8mm-8mm-8mm |
| Mechanical resolution | 10μm / 2μm / 0.7μm / 0.1μm |
| Current leakage accuracy | Coaxial 1pA/V @25°C; Triaxial 100fA/V @25°C; Triaxial 10pA@3kv @25°C, |
| Cable connectors | Banana head / Crocodile clip / Coaxial / Triaxial |
| Charancteristic | 1. Gantry design of the Microscope 2. The Microscope can be tilted or pneumatic lifted to change objective lens easily 3. Can be upgraded to do RF, high current testing and laser repair applications 4. high moving accuracy |
| Module No. | Item | Description |
| SKE4 | Economical Manual Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 70kg; Dimension: 580mm*620mm*730mm (L*W*H). |
| SKE6 | Economical Manual Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 80kg; Dimension: 640mm*700mm*730mm (L*W*H). |
| SKE8 | Economical Manual Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 85kg; Dimension: 660mm*660mm*700mm (L*W*H). |
| SKE12 | Economical Manual Probe Station | Electricity Demand: 220VC, 50~60Hz; Weight (about): 180kg; Dimension: 1030mm*820mm*730mm (L*W*H). |
| Module No. | Item | |
| SKE01 | Microscope tilt mechanism (Tilting 30°Manually by Lever) | |
| SKE02 | Microscope pneumatic lifting mechanism | |
| SKE03 | Laser cutting and repairing | |
| SKE04 | Probe clamp | |
| SKE05 | Dark field of microscope / DIC / Normarski test, Light intensity / wavelength test interface accessory | |
| SKE06 | Liquid crystal leakage analysis package | |
| SKE07 | High voltage and high current measurement package | |
| SKE08 | Hot chuck | |
| SKE09 | High/Low temprature chuck | |
| SKE10 | Shielding box | |
| SKE11 | Special adapter | |
| SKE12 | Vibration free table | |
| SKE13 | Gold-plated chuck | |
| SKE14 | Coaxial / Triaxial chuck | |
| SKE15 | Chuck quick pull-out mechanism | |
| SKE16 | Chuck rotation fine adjustment | |
| SKE17 | Light intensity / wavelength selection | |
| SKE18 | RF Testing accessoriess | |
| SKE19 | Active probe | |
| SKE20 | Low current / Capacitance test | |
| SKE21 | intergration of intergral sphere | |
| SKE22 | Fixture for Fibre optic coupler test | |
| SKE23 | Fixture of PCB / Package test options |
